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氮化硅中Si-H键含量多少好

2025-03-15 08:41:50

推荐回答（2个）

回答1：

氮化硅一般可用作钝化涂层,中介绝缘层、光学器件的介电涂层,有时可用作栅介质层,一般的等离子体淀积氮化硅方法是用不同组分的SiH_4/NH_3 /N_2和惰性气体载体淀积而成,但薄膜里含有高达30%(at.)的氢。从而在栅氧化层附近形成缺陷而引起MOS器件的不稳定。许多研究者认为这是由于氮化物里的Si-H键所引起的麻烦,因此必须努力减氢浓度,或者设法避免Si-H键的有害影响。
氮化硅中Si-H键含量少好。

回答2：

Si3N4中没有Si-H键

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