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硅单质及其化合物应用范围很广。请回答下列问题：(1)制备硅半导体材料必须先得到高纯硅。三氯甲硅烷(SiHC
硅单质及其化合物应用范围很广。请回答下列问题：(1)制备硅半导体材料必须先得到高纯硅。三氯甲硅烷(SiHC
2025-03-16 06:41:17
推荐回答（1个）
回答1：
(1)①SiHCl
3
+H
2
Si+3HCl；②SiHCl
3
+3H
2
O=H
2
SiO
3
↓+3HCl↑+H
2
↑；氧气与氢气混合，可能引起爆炸，氧气可能会氧化SiHCl
3
(2)BC
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